ABSTRACT - ORGANIC POLYMER-FILMS FORMED IN AN RF DISCHARGE WITH APPLICATIONS FOR INTEGRATED OPTICS

被引：5
|
作者：
SMOLINSK.G [1 ]
机构：
[1] BELL TEL LABS INC, MURRAY HILL, NJ 07974 USA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1974年 / 11卷 / 01期
关键词：
D O I：
10.1116/1.1318613
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：33 / 33
页数：1
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