ABSTRACT - ORGANIC POLYMER-FILMS FORMED IN AN RF DISCHARGE WITH APPLICATIONS FOR INTEGRATED OPTICS

被引：5

作者：

SMOLINSK.G ^{[1
]}

机构：

[1] BELL TEL LABS INC, MURRAY HILL, NJ 07974 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1974年 / 11卷 / 01期

关键词：

D O I：

10.1116/1.1318613

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：33 / 33

页数：1

共 50 条

[31] GROWTH-RATE OF THIN POLYMER-FILMS IN A GLOW-DISCHARGE
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