DETERMINATION OF THE DEPTH RESOLUTION IN AUGER DEPTH PROFILING MEASUREMENTS

被引：17
|
作者：
ROLL, K
HAMMER, C
机构：
来源：
THIN SOLID FILMS | 1979年 / 57卷 / 02期
关键词：
D O I：
10.1016/0040-6090(79)90150-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：209 / 212
页数：4
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