DETERMINATION OF THE DEPTH RESOLUTION IN AUGER DEPTH PROFILING MEASUREMENTS

被引：17

|

作者：

ROLL, K

HAMMER, C

机构：

来源：

THIN SOLID FILMS | 1979年 / 57卷 / 02期

关键词：

D O I：

10.1016/0040-6090(79)90150-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：209 / 212

页数：4

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