HETEROGENEOUS SILICON CRYSTAL-GROWTH ON A SINGLE-CRYSTAL SILICON-WAFER

被引：0

作者：

HIDE, I ^{[1
]}

FUJIYA, E ^{[1
]}

MAEDA, Y ^{[1
]}

ITOH, S ^{[1
]}

TANABE, S ^{[1
]}

USUI, T ^{[1
]}

AKAHANE, K ^{[1
]}

机构：

[1] OKI ELECT IND CO LTD,ELECTR DEVICES GRP,HACHIOJI,TOKYO 193,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 12期

关键词：

D O I：

10.1063/1.343606

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5851 / 5853

页数：3

共 50 条

[41] Wafer-bonded single-crystal silicon slot waveguides and ring resonators
Briggs, Ryan M.
Shearn, Michael
Scherer, Axel
Atwater, Harry A.
APPLIED PHYSICS LETTERS, 2009, 94 (02)
[42] DEFECTS IN PREAMORPHIZED SINGLE-CRYSTAL SILICON
AYRES, JR
BROTHERTON, SD
SHANNON, JM
POLITIEK, J
APPLIED PHYSICS LETTERS, 1990, 57 (21) : 2214 - 2216
[43] The molar volume of single-crystal silicon
Becker, P
METROLOGIA, 2001, 38 (01) : 85 - 86
[44] IMPURITIES AND DEFECTS IN SILICON SINGLE-CRYSTAL
MEDA, L
CEROFOLINI, GF
QUEIROLO, G
PROGRESS IN CRYSTAL GROWTH AND CHARACTERIZATION OF MATERIALS, 1987, 15 (02) : 97 - 134
[45] THICKNESS MEASURES OF SINGLE-CRYSTAL SILICON
OKSANICH, AP
BABADZHANOV, LS
MEASUREMENT TECHNIQUES, 1978, 21 (08) : 1098 - 1099
[46] Reshaping of single-crystal silicon microstructures
Yang, EH
Fujita, H
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (3A): : 1580 - 1583
[47] FRACTAL FRACTURE OF SINGLE-CRYSTAL SILICON
TSAI, YL
MECHOLSKY, JJ
JOURNAL OF MATERIALS RESEARCH, 1991, 6 (06) : 1248 - 1263
[48] Single-crystal silicon films on glass
Gadkaree, Kishor P.
Soni, Kamal
Cheng, Shang-Cong
Kosik-Williams, Carlo
JOURNAL OF MATERIALS RESEARCH, 2007, 22 (09) : 2363 - 2367
[49] Reshaping of single-crystal silicon microstructures
Yang, Eui-Hyeok
Fujita, Hiroyuki
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1999, 38 (3 A): : 1580 - 1583
[50] Electrowetting on silicon single-crystal substrates
Kamiya, D
Horie, M
CONTACT ANGLE, WETTABILITY AND ADHESION, VOL 2, 2002, : 507 - 520

← 1 2 3 4 5 →