HETEROGENEOUS SILICON CRYSTAL-GROWTH ON A SINGLE-CRYSTAL SILICON-WAFER

被引：0
|
作者：
HIDE, I [1 ]
FUJIYA, E [1 ]
MAEDA, Y [1 ]
ITOH, S [1 ]
TANABE, S [1 ]
USUI, T [1 ]
AKAHANE, K [1 ]
机构：
[1] OKI ELECT IND CO LTD,ELECTR DEVICES GRP,HACHIOJI,TOKYO 193,JAPAN
来源：
JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 12期
关键词：
D O I：
10.1063/1.343606
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：5851 / 5853
页数：3
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