SINGLE-ELEMENT ROTATING-POLARIZER ELLIPSOMETER FOR FILM-SUBSTRATE SYSTEMS

被引:15
|
作者
ZAGHLOUL, ARM
AZZAM, RMA
机构
[1] UNIV CAIRO,FAC ENGN,DEPT ELECT ENGN,CAIRO,EGYPT
[2] UNIV NEBRASKA,MED CTR,SCH MED,DEPT INTERNAL MED,DIV HEMATOL,OMAHA,NE 68105
[3] UNIV NEBRASKA,COLL ENGN,ELECT MAT LAB,LINCOLN,NE 68508
关键词
D O I
10.1364/JOSA.67.001286
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:1286 / 1287
页数:2
相关论文
共 50 条
  • [31] Indentation and imprint mapping for the identification of interface properties in film-substrate systems
    M. Bocciarelli
    G. Bolzon
    International Journal of Fracture, 2009, 155 : 1 - 17
  • [32] Analysis of the Spectro-ellipsometric Data with Backside Reflection from Semi-transparent Substrate by Using a Rotating Polarizer Ellipsometer
    Seo, Yeong Jin
    Park, Sang Uk
    Yang, Seong Mo
    Kim, Sang Youl
    KOREAN JOURNAL OF OPTICS AND PHOTONICS, 2011, 22 (04) : 170 - 178
  • [33] Substrate-free miniaturized thin-film filters for single-element coarse wavelength division multiplexing fibers
    Ruesseler, Anna K.
    Gehrke, Philipp
    Carstens, Florian
    Hoffmann, Gerd A.
    Schonsee, Guido
    Thiel, Axel
    Vitt, Martin
    Wienke, Andreas
    Ristau, Detlev
    APPLIED OPTICS, 2023, 62 (07) : B188 - B194
  • [34] Extension of the Stoney formula for film-substrate systems with gradient stress for MEMS applications
    Huang, SS
    Zhang, X
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2006, 16 (02) : 382 - 389
  • [35] Effect of residual stress on the delamination response of film-substrate systems under bending
    Forschelen, P. J. J.
    Suiker, A. S. J.
    van der Sluis, O.
    INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 2016, 97-98 : 284 - 299
  • [36] A review of theoretical analysis techniques for cracking and corrosive degradation of film-substrate systems
    Nazir, M. H.
    Khan, Z. A.
    ENGINEERING FAILURE ANALYSIS, 2017, 72 : 80 - 113
  • [37] Optical interferometry diagnostics in laser-induced spallation on film-substrate systems
    Zhou, M
    Zhang, YK
    Cai, L
    Shen, ZH
    Zhang, XR
    Zhang, SY
    SURFACE & COATINGS TECHNOLOGY, 2003, 165 (02): : 146 - 153
  • [38] Real-time combined reflection and transmission ellipsometry for film-substrate systems
    Elshazly-Zaghloul, M.
    POLARIZATION SCIENCE AND REMOTE SENSING VI, 2013, 8873
  • [39] Choice of models for the investigation of dielectric film-substrate systems by ellipsometric and spectrophotometric methods
    Ayupov, B.M.
    Surface Investigation X-Ray, Synchrotron and Neutron Techniques, 2001, 16 (04): : 653 - 660
  • [40] Effects of tension-compression asymmetry on the surface wrinkling of film-substrate systems
    Huang, Xiao
    Li, Bo
    Hong, Wei
    Cao, Yan-Ping
    Feng, Xi-Qiao
    JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS, 2016, 94 : 88 - 104