Analysis of the Spectro-ellipsometric Data with Backside Reflection from Semi-transparent Substrate by Using a Rotating Polarizer Ellipsometer

被引：5

作者：

Seo, Yeong Jin ^{[1
]}

Park, Sang Uk ^{[1
]}

Yang, Seong Mo ^{[2
]}

Kim, Sang Youl ^{[1
,2
]}

机构：

[1] Ellipsotechnol Co, Suwon 442190, South Korea

[2] Ajou Univ, Dept Mol Sci & Technol, Suwon 443749, South Korea

来源：

KOREAN JOURNAL OF OPTICS AND PHOTONICS | 2011年 / 22卷 / 04期

关键词：

Backside reflection; Semi-transparent substrate; Ellipsometry; Extinction coefficient of glass; ITO thin film;

D O I：

10.3807/KJOP.2011.22.4.170

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The spectroscopic ellipsometric constants are analyzed to determine the thickness and the complex refractive index of a film coated on a semi-transparent substrate, with the reflection from the backside of the substrate properly considered. Expressions representing the effect of the backside reflection on ellipsometric constants are derived using the thickness and the complex refractive index of the substrate. The thickness and the complex refractive of an ITO thin film coated on a glass substrate are obtained by using this method. The results agree quite well with the ones obtained by following the conventional modeling procedure where the backside reflection is neglected during ellipsometric measurement and analysis.

引用

页码：170 / 178

页数：9