SILICON NITRIDE DEPOSITION IN A HORIZONTAL REACTOR

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作者：
BADCOCK, FR
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来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1969年 / 116卷 / 08期
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中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
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页码：C289 / &
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