CONVECTION MASS-TRANSFER ANALYSIS OF SILICON EPITAXIAL DEPOSITION .2. GAS FLOW PATTERNS AND EPITAXIAL DEPOSITION

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SUGAWARA, K

TOCHIKUH.H

TAKAHASH.R

KOGA, Y

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JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1970年 / 117卷 / 03期

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O646 [电化学、电解、磁化学];

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081704 ;

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页码：C107 / &

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