ZIRCALOY OXIDE THICKNESS MEASUREMENT BY ELLIPSOMETRY

被引:5
|
作者
PENG, YK
BASHARA, NM
机构
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D O I
10.1016/0022-3115(80)90115-4
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:306 / 312
页数:7
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