ZIRCALOY OXIDE THICKNESS MEASUREMENT BY ELLIPSOMETRY

被引：5
|
作者：
PENG, YK
BASHARA, NM
机构：
来源：
JOURNAL OF NUCLEAR MATERIALS | 1980年 / 92卷 / 2-3期
关键词：
D O I：
10.1016/0022-3115(80)90115-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：306 / 312
页数：7
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