TEMPERATURE-DEPENDENCE OF STRESSES IN CHEMICAL VAPOR-DEPOSITED VITREOUS FILMS

被引：41

|

作者：

SHINTANI, A

SUGAKI, S

NAKASHIMA, H

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 08期

关键词：

D O I：

10.1063/1.328277

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：4197 / 4205

页数：9

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