TEMPERATURE-DEPENDENCE OF STRESSES IN CHEMICAL VAPOR-DEPOSITED VITREOUS FILMS

被引：41
|
作者：
SHINTANI, A
SUGAKI, S
NAKASHIMA, H
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 08期
关键词：
D O I：
10.1063/1.328277
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：4197 / 4205
页数：9
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