DIAGNOSTICS BY OPTICAL-EMISSION SPECTROSCOPY IN THE VICINITY OF THE SUBSTRATE DURING MAGNETRON SPUTTERING OF TI

被引：10
|
作者：
PECH, T
CHABRERIE, JP
RICARD, A
机构：
[1] UNIV PARIS 11,CNRS,UNITE 73,PHYS GAZ & PLASMAS LAB,F-91405 ORSAY,FRANCE
[2] ECOLE SUPER ELECT,GRECO CONTACTS ELECT 40,F-91190 GIF SUR YVETTE,FRANCE
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 05期
关键词：
D O I：
10.1116/1.575463
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：2987 / 2991
页数：5
相关论文
共 50 条
  • [21] OPTICAL-EMISSION AND LASER SPECTROSCOPY IN STUDIES OF SPUTTERING - ACTUAL RESEARCH ACTIVITIES AND RECENT ACHIEVEMENTS
    HUSINSKY, W
    BETZ, G
    SCANNING MICROSCOPY, 1987, 1 (04) : 1603 - 1616
  • [22] AXIAL DISTRIBUTION OF OPTICAL-EMISSION IN A PLANAR MAGNETRON DISCHARGE
    GU, L
    LIEBERMAN, MA
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (05): : 2960 - 2964
  • [23] DC MAGNETRON SPUTTERING OF OXIDATION-RESISTANT CHROMIUM AND CRN FILMS MONITORED BY OPTICAL-EMISSION SPECTROMETRY
    BENIEN, H
    MAUSHART, J
    MEYER, M
    SUCHENTRUNK, R
    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1991, 139 : 126 - 131
  • [24] DIAGNOSTICS OF A THERMAL PLASMA-JET BY OPTICAL-EMISSION SPECTROSCOPY AND ENTHALPY PROBE MEASUREMENTS
    CHEN, WLT
    HEBERLEIN, J
    PFENDER, E
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1993, 206 : 51 - IEC
  • [25] Application of Optical Emission Spectroscopy for Predicting the Composition of Films in Reactive Magnetron Sputtering of Ti-Al Composite Targets
    Doan, H. T.
    Golosov, D. A.
    Zhang, J.
    Melnikov, S. N.
    Zavadski, S. M.
    SURFACE ENGINEERING AND APPLIED ELECTROCHEMISTRY, 2023, 59 (05) : 682 - 689
  • [26] Langmuir probe and optical emission spectroscopy studies for RF magnetron sputtering during TiON thin film deposition
    Metawa, A. E.
    El-Hossary, F. M.
    Raaif, M.
    SalahEl-Deen, M.
    Abd El-Moula, A. A.
    CHINESE JOURNAL OF PHYSICS, 2020, 68 : 168 - 177
  • [27] ISOTOPIC ANALYSIS OF LITHIUM BY OPTICAL-EMISSION SPECTROSCOPY
    BATISTONI, DA
    CAPACCIOLI, JH
    ANALES DE LA ASOCIACION QUIMICA ARGENTINA, 1982, 70 (02): : 231 - 235
  • [28] EMISSION YIELDS IN GLOW-DISCHARGE OPTICAL-EMISSION SPECTROSCOPY
    WEISS, Z
    SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1993, 48 (10) : 1247 - 1257
  • [29] Time-resolved optical emission spectroscopy of pulsed DC magnetron sputtering plasmas
    Lopez, J
    Zhu, W
    Freilich, A
    Belkind, A
    Becker, K
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2005, 38 (11) : 1769 - 1780
  • [30] Study on the Effect of Base Pressure on Magnetron Sputtering Discharge Plasma by Optical Emission Spectroscopy
    Yugeswaran, S.
    Suresh, K.
    Selvarajan, V.
    PLASMA SCIENCE & TECHNOLOGY, 2010, 12 (01) : 35 - 40
12345