WET HYDROGEN OXIDATION IN THE PRESENCE OF MOLYBDENUM AND TUNGSTEN FOR VLSI APPLICATIONS

被引：0
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作者：
KWASNICK, RF
GORCZYCA, TB
WOODRUFF, DW
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 01期
关键词：
D O I：
10.1149/1.2095547
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
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页码：176 / 179
页数：4
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