WET HYDROGEN OXIDATION IN THE PRESENCE OF MOLYBDENUM AND TUNGSTEN FOR VLSI APPLICATIONS

被引：0

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作者：

KWASNICK, RF

GORCZYCA, TB

WOODRUFF, DW

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 01期

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D O I：

10.1149/1.2095547

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

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页码：176 / 179

页数：4

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