ASSESSMENT OF THE QUALITY OF ANODIC NATIVE OXIDES OF GAAS FOR MOS DEVICES

被引：16
|
作者：
BREEZE, PA
HARTNAGEL, HL
机构：
来源：
THIN SOLID FILMS | 1979年 / 56卷 / 1-2期
关键词：
D O I：
10.1016/0040-6090(79)90051-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：51 / 61
页数：11
相关论文
共 50 条
  • [21] Composition and growth of anodic and thermal oxides on InP and GaAs
    Pakes, A
    Skeldon, P
    Thompson, GE
    Hussey, RJ
    Moisa, S
    Sproule, GI
    Landheer, D
    Graham, MJ
    SURFACE AND INTERFACE ANALYSIS, 2002, 34 (01) : 481 - 484
  • [22] Wettability and "petal effect" of GaAs native oxides
    Gocalinska, A.
    Gradkowski, K.
    Dimastrodonato, V.
    Mereni, L. O.
    Juska, G.
    Huyet, G.
    Pelucchi, E.
    JOURNAL OF APPLIED PHYSICS, 2011, 110 (03)
  • [23] MOS CHARACTERIZATION OF LOW LEAKAGE NATIVE OXIDES ON ALGAAS
    NICOLLIAN, EH
    SCHWARTZ, B
    KOSZI, LA
    SCHUMAKER, NE
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (06) : 989 - 991
  • [24] ORIGIN AND EFFECTS OF INTERFACE TRAPS IN ANODIC NATIVE OXIDES ON INSB
    SHAPIRA, Y
    BREGMAN, J
    CALAHORRA, Z
    APPLIED PHYSICS LETTERS, 1985, 47 (05) : 495 - 497
  • [25] ANODIC OXIDES ON GAAS .3. ELECTRICAL-PROPERTIES
    BAYRAKTAROGLU, B
    HARTNAGEL, HL
    INTERNATIONAL JOURNAL OF ELECTRONICS, 1978, 45 (06) : 561 - 571
  • [26] ION-BEAM CHARACTERIZATION OF THE GAAS GAAS OXIDE INTERFACE FOR PLASMA AND ANODIC OXIDES
    MAGGIORE, CJ
    WAGNER, RS
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (03): : 463 - 466
  • [27] ELECTRIC CHARGE IN GAAS NATIVE OXIDES - ANNEALING CHARACTERISTICS
    SIEJKA, J
    MORAWSKI, A
    LAGOWSKI, J
    GATOS, HC
    APPLIED PHYSICS LETTERS, 1981, 38 (07) : 552 - 554
  • [28] SURFACE-ROUGHNESS STUDIES OF NATIVE OXIDES OF GAAS
    BOTTKA, N
    DANCY, JH
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (11) : 2521 - 2523
  • [29] RAMAN AND XPS STUDY OF SOME NATIVE OXIDES OF GAAS
    GRIFFITHS, JE
    DISTEFANO, D
    SCHWARTZ, GP
    GUALTIERI, G
    SCHWARTZ, B
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (11) : C469 - C469
  • [30] Characteristics of InAlAs/InP and InAIP/GaAs native oxides
    Bae, Seong-Ju
    Kim, Jong-Min
    Park, Chang-Young
    Lee, Yong-Tak
    SOLID-STATE ELECTRONICS, 2006, 50 (9-10) : 1625 - 1628
12345