APPLICATION OF GLOW-DISCHARGE MASS-SPECTROMETRY AND SPUTTERED NEUTRAL MASS-SPECTROMETRY TO MATERIALS CHARACTERIZATION

被引：30

|

作者：

CHU, PK

HUNEKE, JC

BLATTNER, RJ

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 03期

关键词：

D O I：

10.1116/1.574148

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：295 / 301

页数：7

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