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GROWTH OF HYDROGENATED AMORPHOUS-SILICON BY AN INDUCTIVE COUPLING GLOW-DISCHARGE REACTOR
被引:1
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作者
:
YOKOTA, K
论文数:
0
引用数:
0
h-index:
0
YOKOTA, K
NAKAYAMA, S
论文数:
0
引用数:
0
h-index:
0
NAKAYAMA, S
OHNO, Y
论文数:
0
引用数:
0
h-index:
0
OHNO, Y
KATAYAMA, S
论文数:
0
引用数:
0
h-index:
0
KATAYAMA, S
机构
:
来源
:
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
|
1987年
/ 26卷
/ 06期
关键词
:
D O I
:
10.1143/JJAP.26.965
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
引用
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页码:965 / 966
页数:2
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