INSTALLATION FOR THE MEASUREMENT OF THE ADHESION OF THIN-FILMS

被引：0

|

作者：

LABUNOV, VA

LESHCHENKO, IN

UVAROV, AR

机构：

来源：

INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 1978年 / 21卷 / 04期

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：1146 / 1147

页数：2

相关论文

共 50 条

[21] MEASUREMENT OF INTERNAL STRESS IN THIN-FILMS
PAESLER, MA
FRITZSCHE, H
REVIEW OF SCIENTIFIC INSTRUMENTS, 1974, 45 (01): : 114 - 115
[22] MEASUREMENT OF MAGNETOSTRICTION IN FERROMAGNETIC THIN-FILMS
KLOKHOLM, E
IEEE TRANSACTIONS ON MAGNETICS, 1976, 12 (06) : 819 - 821
[23] TORQUE MEASUREMENT OF MAGNETIC THIN-FILMS
WIELINGA, T
JOURNAL OF APPLIED PHYSICS, 1979, 50 (07) : 4888 - 4890
[24] NONDESTRUCTIVE MEASUREMENT OF THIN-FILMS IN MICROELECTRONICS
DAGHIR, KS
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (08) : C249 - C249
[25] ELASTICITY AND ADHESION OF THIN-FILMS BY A MECHANICAL RESONANCE METHOD
LIST, FA
MCKEE, RA
THIN SOLID FILMS, 1987, 151 (01) : 17 - 25
[26] ADHESION MEASUREMENT OF TI THIN-FILMS ON SI SUBSTRATE USING INTERNAL-STRESS IN OVERCOATED NI FILMS
KONDO, I
TAKENAKA, O
KAMIYA, T
HAYAKAWA, K
KINBARA, A
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1994, 12 (01): : 169 - 173
[27] MICROINDENTATION ADHESION TESTER AND ITS APPLICATION TO THIN-FILMS
TSUKAMOTO, Y
KURODA, H
SATO, A
YAMAGUCHI, H
THIN SOLID FILMS, 1992, 213 (02) : 220 - 225
[28] ADHESION AND INTERNAL-STRESS IN THIN-FILMS OF ALUMINUM
LAUGIER, M
THIN SOLID FILMS, 1981, 79 (01) : 15 - 19
[29] METHOD OF MEASUREMENT AND ANALYSIS OF TEXTURE IN THIN-FILMS
SZPUNAR, JA
AHLROOS, S
TAVERNIER, P
JOURNAL OF MATERIALS SCIENCE, 1993, 28 (09) : 2366 - 2376
[30] MEASUREMENT OF THE VISCOSITY OF LIQUIDS IN VERY THIN-FILMS
ISRAELACHVILI, JN
JOURNAL OF COLLOID AND INTERFACE SCIENCE, 1986, 110 (01) : 263 - 271

← 1 2 3 4 5 →