PLANAR, LOW-LOSS OPTICAL WAVE-GUIDES FABRICATED BY SOLID-PHASE REGROWTH

被引：7

作者：

XIA, W

YU, LS

GUAN, ZF

PAPPERT, SA

YU, PKL

LAU, SS

SCHWARZ, SA

PUDENZI, MAA

FLOREZ, LT

HARBISON, JP

机构：

[1] BELLCORE, RED BANK, NJ 07701 USA

[2] USN, CTR OCEAN SYST, SAN DIEGO, CA 92132 USA

来源：

APPLIED PHYSICS LETTERS | 1992年 / 61卷 / 11期

关键词：

D O I：

10.1063/1.107614

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Planar, low-loss AlGaAs/GaAs waveguides have been fabricated using the solid-phase regrowth (SPR) process. Single-mode waveguide with a propagation loss as low as 1.6 dB/cm have been obtained. This process requires only thin-film deposition and low-temperature short-duration annealing (i.e., 650-degrees-C for 30 s), thus making the SPR method a much simplified technique to induce compositional disordering. Simultaneous electrical isolation and compositional disordering are also demonstrated with the SPR process.

引用

页码：1269 / 1271

页数：3

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