PLANAR, LOW-LOSS OPTICAL WAVE-GUIDES FABRICATED BY SOLID-PHASE REGROWTH

被引:7
|
作者
XIA, W
YU, LS
GUAN, ZF
PAPPERT, SA
YU, PKL
LAU, SS
SCHWARZ, SA
PUDENZI, MAA
FLOREZ, LT
HARBISON, JP
机构
[1] BELLCORE, RED BANK, NJ 07701 USA
[2] USN, CTR OCEAN SYST, SAN DIEGO, CA 92132 USA
关键词
D O I
10.1063/1.107614
中图分类号
O59 [应用物理学];
学科分类号
摘要
Planar, low-loss AlGaAs/GaAs waveguides have been fabricated using the solid-phase regrowth (SPR) process. Single-mode waveguide with a propagation loss as low as 1.6 dB/cm have been obtained. This process requires only thin-film deposition and low-temperature short-duration annealing (i.e., 650-degrees-C for 30 s), thus making the SPR method a much simplified technique to induce compositional disordering. Simultaneous electrical isolation and compositional disordering are also demonstrated with the SPR process.
引用
收藏
页码:1269 / 1271
页数:3
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