PREPARATION OF SUBSTRATES FOR FILM DEPOSITION USING GLOW-DISCHARGE TECHNIQUES

被引：42
|
作者：
VOSSEN, JL
机构：
来源：
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1979年 / 12卷 / 03期
关键词：
D O I：
10.1088/0022-3735/12/3/002
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：159 / 167
页数：9
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