ACCURACY AND SENSITIVITY OF ELLIPSOMETRY METHOD .2.

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作者：

SVITASHEV, KK

SEMENENKO, AI

SEMENENKO, LV

SOKOLOV, VK

FILATOVA, ES

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OPTIKA I SPEKTROSKOPIYA | 1977年 / 42卷 / 06期

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中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

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页码：1142 / 1147

页数：6

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