ACCURACY AND SENSITIVITY OF ELLIPSOMETRY METHOD .2.

被引：0
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作者：
SVITASHEV, KK
SEMENENKO, AI
SEMENENKO, LV
SOKOLOV, VK
FILATOVA, ES
机构：
来源：
OPTIKA I SPEKTROSKOPIYA | 1977年 / 42卷 / 06期
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中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
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页码：1142 / 1147
页数：6
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