DEFECT PHOTO-LUMINESCENCE FROM PULSED-LASER-ANNEALED ION-IMPLANTED SI

被引：28
|
作者：
SKOLNICK, MS
CULLIS, AG
WEBBER, HC
机构：
来源：
APPLIED PHYSICS LETTERS | 1981年 / 38卷 / 06期
关键词：
D O I：
10.1063/1.92405
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：464 / 466
页数：3
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