DEFECT PHOTO-LUMINESCENCE FROM PULSED-LASER-ANNEALED ION-IMPLANTED SI

被引：28
|
作者：
SKOLNICK, MS
CULLIS, AG
WEBBER, HC
机构：
来源：
APPLIED PHYSICS LETTERS | 1981年 / 38卷 / 06期
关键词：
D O I：
10.1063/1.92405
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：464 / 466
页数：3
相关论文
共 50 条
  • [21] PHOTO-LUMINESCENCE IN LASER-ANNEALED NEUTRON TRANSMUTED SILICON - ISOELECTRONIC TRAPS
    ROSTWOROWSKI, JA
    PARSONS, RR
    CANADIAN JOURNAL OF PHYSICS, 1981, 59 (04) : 496 - 499
  • [22] SUBGAP ABSORPTION STUDY OF DEFECTS IN ION-IMPLANTED AND ANNEALED SI LAYERS
    LUCIANI, L
    ZAMMIT, U
    MARINELLI, M
    PIZZOFERRATO, R
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1990, 50 (05): : 495 - 498
  • [23] CHARGE CHARACTERISTICS OF ION-IMPLANTED AND ANNEALED NITRIDE OXIDE SI STRUCTURES
    STEIN, HJ
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (03) : C79 - C79
  • [24] RECOMBINATION LUMINESCENCE FROM ION-IMPLANTED SILICON
    KIRKPATRICK, CG
    NOONAN, JR
    STREETMAN, BG
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1976, 30 (02): : 97 - 106
  • [25] PHOTO-LUMINESCENCE STUDY OF LASER ANNEALING IN PHOSPHORUS-IMPLANTED AND UN-IMPLANTED SILICON
    NAKASHIMA, H
    SHIRAKI, Y
    MIYAO, M
    JOURNAL OF APPLIED PHYSICS, 1979, 50 (09) : 5966 - 5969
  • [26] DEFECT FORMATION IN ION-IMPLANTED Si(Tl) LAYERS.
    Piskunov, D.I.
    Soviet Physics - Lebedev Institute Reports (English Translation of Sbornik Kratkie Soobshcheniya p, 1985, (08): : 61 - 64
  • [27] ION-IMPLANTED LASER-ANNEALED GAAS SOLAR-CELLS
    FAN, JCC
    CHAPMAN, RL
    DONNELLY, JP
    TURNER, GW
    BOZLER, CO
    APPLIED PHYSICS LETTERS, 1979, 34 (11) : 780 - 782
  • [28] DEFECT ANNEALING INVESTIGATION IN ION-IMPLANTED SI BY CESR TECHNIQUE
    DVURECHENSKY, AV
    GERASIMENKO, NN
    GLAZMAN, VB
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1976, 31 (01): : 37 - 40
  • [29] Impurity and clustering effects on defect evolution in ion-implanted Si
    Libertino, S
    Benton, JL
    Coffa, S
    Eaglesham, DJ
    NUOVO CIMENTO DELLA SOCIETA ITALIANA DI FISICA D-CONDENSED MATTER ATOMIC MOLECULAR AND CHEMICAL PHYSICS FLUIDS PLASMAS BIOPHYSICS, 1998, 20 (10): : 1529 - 1548
  • [30] Raman scattering probe of ion-implanted and pulse laser annealed GaAs
    Verma, P
    Jain, KP
    Abbi, SC
    JOURNAL OF APPLIED PHYSICS, 1996, 79 (08) : 3921 - 3926
12345