INTERSTITIAL AND SUBSTITUTIONAL COMPONENTS IN ION-IMPLANTED SILICON

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作者：

MAYER, JW

DAVIES, JA

ERIKSSON, L

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来源：

BULLETIN OF THE AMERICAN PHYSICAL SOCIETY | 1968年 / 13卷 / 03期

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O4 [物理学];

学科分类号：

0702 ;

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页码：376 / &

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