ION-BEAM MIXING OF TI/SI-LAYERS

被引：0
|
作者：
KOHLHOF, K
MANTL, S
STRITZKER, B
机构：
来源：
VIDE-SCIENCE TECHNIQUE ET APPLICATIONS | 1987年 / 42卷 / 236期
关键词：
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：129 / 131
页数：3
相关论文
共 50 条
  • [41] AN ION-BEAM MIXING MODEL FOR COMPOUND FORMATION - THE CASE OF PD/SI
    DESIMONI, J
    TRAVERSE, A
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 (80-81): : 91 - 93
  • [42] THE EFFECT OF TEMPERATURE ON ION-BEAM MIXING OF MO FILMS ON SI SUBSTRATES
    GAO, WY
    LI, HC
    WANG, RL
    LIU, JR
    VACUUM, 1989, 39 (2-4) : 259 - 261
  • [43] MEV ION-BEAM MIXING OF AU/SI AND AU/GE SYSTEMS
    ZHAO, GQ
    REN, YH
    ZHOU, ZY
    TANG, GH
    TANG, JY
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 48 (1-4): : 513 - 516
  • [44] LOW-ENERGY ION-BEAM ANNEALING OF AMORPHISED LAYERS IN SI
    ZEROUAL, B
    CARTER, G
    VACUUM, 1991, 42 (8-9) : 525 - 531
  • [45] Ion-beam mixing of Ag/Fe and In/Fe layers studied by hyperfine techniques
    Neubauer, M
    Lieb, KP
    Schaaf, P
    Uhrmacher, M
    PHYSICAL REVIEW B, 1996, 53 (15): : 10237 - 10243
  • [46] ION-BEAM PROCESSES IN SI
    HOLLAND, OW
    NARAYAN, J
    FATHY, D
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR): : 243 - 250
  • [47] Ion-beam mixing of Ag/Fe and In/Fe layers studied by hyperfine techniques
    Phys Rev B, 15 (10237):
  • [48] ION-BEAM MIXING IN INSULATOR SUBSTRATES
    MCHARGUE, CJ
    JOSLIN, DL
    WHITE, CW
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 91 (1-4): : 549 - 557
  • [49] ION-BEAM MIXING AND LIQUID INTERDIFFUSION
    NASTASI, M
    MAYER, JW
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1994, 130 : 367 - 385
  • [50] ION-BEAM MIXING IN SILICON SYSTEMS
    PAINE, BM
    PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1985, 530 : 114 - 121
12345