ION-BEAM MIXING OF TI/SI-LAYERS

被引：0
|
作者：
KOHLHOF, K
MANTL, S
STRITZKER, B
机构：
来源：
VIDE-SCIENCE TECHNIQUE ET APPLICATIONS | 1987年 / 42卷 / 236期
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D O I：
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中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
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页码：129 / 131
页数：3
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