TWO-DIMENSIONAL ELECTRON-BEAM CHARGING MODEL FOR POLYMER-FILMS

被引:11
|
作者
REEVES, RD
BALMAIN, KG
机构
关键词
D O I
10.1109/TNS.1981.4335762
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:4547 / 4552
页数:6
相关论文
共 50 条
  • [41] A two-dimensional polymer growth model
    Vogt, M
    Hernandez, R
    JOURNAL OF CHEMICAL PHYSICS, 2001, 115 (03): : 1575 - 1585
  • [42] Effects of electron-beam irradiation on some mechanical properties of polymer films
    Zenkiewicz, M
    RADIATION PHYSICS AND CHEMISTRY, 2004, 69 (05) : 373 - 378
  • [43] MEASUREMENT OF DIMENSIONAL CHANGES IN THIN POLYMER-FILMS
    GREENBERG, HJ
    STEPHENS, RL
    TALKE, FE
    EXPERIMENTAL MECHANICS, 1978, 18 (03) : 115 - 120
  • [44] Charging dynamics and strong localization of a two-dimensional electron cloud
    Dianoux, R.
    Smilde, H. J. H.
    Marchi, F.
    Buffet, N.
    Mur, P.
    Comin, F.
    Chevrier, J.
    NANOTECHNOLOGY, 2007, 18 (32)
  • [45] In situ beam drift detection using a two-dimensional electron-beam position monitoring system for multiple-electron-beam-direct-write lithography
    Chen, Sheng-Yung
    Tsai, Kuen-Yu
    Ng, Philip C. W.
    Hoi-Tou Ng
    Liu, Chun-Hung
    Shen, Yu-Tian
    Kuan, Chieh-Hsiung
    Chen, Yung-Yaw
    Kuo, Yi-Hung
    Wu, Cheng-Ju
    Yen, Jia-Yush
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2011, 29 (04):
  • [46] Nonlinear frequency conversion in periodic two-dimensional LiNbO3 poled by electron-beam lithography
    Glickman, Y
    Winebrand, E
    Kasimov, D
    Arie, A
    Rosenman, G
    2005 CONFERENCE ON LASERS & ELECTRO-OPTICS (CLEO), VOLS 1-3, 2005, : 959 - 961
  • [47] Controllable Carrier Doping in Two-Dimensional Materials Using Electron-Beam Irradiation and Scalable Oxide Dielectrics
    Wang, Lu
    Guo, Zejing
    Lan, Qing
    Song, Wenqing
    Zhong, Zhipeng
    Yang, Kunlin
    Zhao, Tuoyu
    Huang, Hai
    Zhang, Cheng
    Shi, Wu
    MICROMACHINES, 2023, 14 (11)
  • [48] ION-BEAM-INDUCED CONDUCTIVITY IN POLYMER-FILMS
    VENKATESAN, T
    FORREST, SR
    KAPLAN, ML
    MURRAY, CA
    SCHMIDT, PH
    WILKENS, BJ
    JOURNAL OF APPLIED PHYSICS, 1983, 54 (06) : 3150 - 3153
  • [49] Surface potential and charging of polymer films submitted to defocused electron beam irradiation
    Liu, Jing
    Zhang, Hai-Bo
    Ding, Yue-Hu
    Yan, Zhong
    Tong, Ji-sheng
    Yuan, Ye
    Zhao, Qing
    MICRON, 2019, 116 : 100 - 107
  • [50] DYNAMICS OF ION-BEAM MODIFICATION OF POLYMER-FILMS
    VENKATESAN, T
    BROWN, WL
    MURRAY, CA
    MARCANTONIO, KJ
    WILKENS, BJ
    POLYMER ENGINEERING AND SCIENCE, 1983, 23 (17): : 931 - 934