共 50 条
- [21] Resist charging in electron-beam lithography 18TH ANNUAL SYMPOSIUM ON PHOTOMASK TECHNOLOGY AND MANAGEMENT, 1998, 3546 : 383 - 388
- [22] WORKPIECE CHARGING IN ELECTRON-BEAM LITHOGRAPHY JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (03): : 1367 - 1371
- [23] NUMERICAL-SIMULATION OF TWO-DIMENSIONAL RELAXATION OF A DIFFUSE ELECTRON-BEAM INJECTED INTO THE PLASMA DOKLADY AKADEMII NAUK SSSR, 1988, 301 (05): : 1091 - 1094
- [24] THIN POLYMER-FILMS AS NON-CHARGING SURFACES FOR SCANNING ELECTRON-MICROSCOPY JOURNAL OF MICROSCOPY-OXFORD, 1975, 104 (AUG): : 281 - 285
- [27] Electron-beam charging of ferroelectric films of vinylidene fluoride-tetrafluoroethylene copolymer VYSOKOMOLEKULYARNYE SOEDINENIYA SERIYA A & SERIYA B, 1999, 41 (01): : 125 - 127
- [30] Two-dimensional spatial-phase-locked electron-beam lithography via sparse sampling JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (06): : 3268 - 3271