共 50 条
- [21] ELECTRON-CYCLOTRON-RESONANCE PLASMA REACTOR FOR CRYOGENIC ETCHING REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (12): : 3572 - 3584
- [23] ELECTRON-CYCLOTRON-RESONANCE PLASMA OXIDATION STUDIES OF INP JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (02): : 540 - 546
- [24] CHARACTERISTICS OF A MICROWAVE ELECTRON-CYCLOTRON-RESONANCE PLASMA SOURCE REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (05): : 3219 - 3227
- [25] TUNGSTEN ETCHING USING AN ELECTRON-CYCLOTRON-RESONANCE PLASMA JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (03): : 810 - 814
- [26] Research on electromagnetic characters of electron-cyclotron-resonance plasma PROCEEDINGS OF THE 2004 CHINA-JAPAN JOINT MEETING ON MICROWAVES, 2004, : 210 - 213
- [28] An Experimental Apparatus with Microwave Electron-Cyclotron-Resonance Plasma Instruments and Experimental Techniques (English Translation of Pribory I Tekhnika Eksperimenta), 1996, 39
- [30] Electron and ion energies in plasmas generated by the electron-cyclotron-resonance mechanism Phys Plasmas, 3 (991):