EXTENSION OF DIGITAL AUTOMATIC METHOD FOR MEASURING PERMITTIVITY OF THIN DIELECTRIC FILMS

被引：0

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作者：

RZEPECKA, MA

HAMID, MAK

机构：

来源：

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES | 1972年 / MT20卷 / 09期

关键词：

D O I：

10.1109/TMTT.1972.1127830

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

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页码：628 / &

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