EXTENSION OF DIGITAL AUTOMATIC METHOD FOR MEASURING PERMITTIVITY OF THIN DIELECTRIC FILMS

被引：0
|
作者：
RZEPECKA, MA
HAMID, MAK
机构：
来源：
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES | 1972年 / MT20卷 / 09期
关键词：
D O I：
10.1109/TMTT.1972.1127830
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：628 / &
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