ETCHING CHARACTERISTICS OF DEFECTS IN THE INGAASP-INP LPE LAYERS

被引：13

|

作者：

KOTANI, T

KOMIYA, S

NAKAI, S

YAMAOKA, Y

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1980年 / 127卷 / 10期

关键词：

D O I：

10.1149/1.2129391

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

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页码：2273 / 2277

页数：5

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