A HIGH-PRECISION THINNING TECHNIQUE FOR GAAS SUBSTRATES

被引：0
|
作者：
KARAKIDOY, T [1 ]
NAKADA, H [1 ]
WATANABE, J [1 ]
机构：
[1] NIPPON TELEGRAPH & TEL PUBL CORP, MUSASHINO ELECT COMMUN LAB, APPL ELECTR LABS, MUSASHINO, TOKYO 180, JAPAN
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 08期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C377 / C377
页数：1
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