A HIGH-PRECISION THINNING TECHNIQUE FOR GAAS SUBSTRATES

被引：0

作者：

KARAKIDOY, T ^{[1
]}

NAKADA, H ^{[1
]}

WATANABE, J ^{[1
]}

机构：

[1] NIPPON TELEGRAPH & TEL PUBL CORP, MUSASHINO ELECT COMMUN LAB, APPL ELECTR LABS, MUSASHINO, TOKYO 180, JAPAN

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 08期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：C377 / C377

页数：1

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