KINETICS OF POLYMER ETCHING IN AN OXYGEN GLOW-DISCHARGE

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作者：

JURGENSEN, CW

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POLYMERS IN MICROLITHOGRAPHY: MATERIALS AND PROCESSES | 1989年 / 412卷

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O69 [应用化学];

学科分类号：

081704 ;

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页码：210 / 233

页数：24

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