KINETICS OF POLYMER ETCHING IN AN OXYGEN GLOW-DISCHARGE

被引：0

作者：

JURGENSEN, CW

机构：

来源：

POLYMERS IN MICROLITHOGRAPHY: MATERIALS AND PROCESSES | 1989年 / 412卷

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D O I：

暂无

中图分类号：

O69 [应用化学];

学科分类号：

081704 ;

摘要：

引用

页码：210 / 233

页数：24

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[21] CONFINED OXYGEN GLOW-DISCHARGE CLEANING OF SILICON
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