KINETICS OF POLYMER ETCHING IN AN OXYGEN GLOW-DISCHARGE

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作者：
JURGENSEN, CW
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来源：
POLYMERS IN MICROLITHOGRAPHY: MATERIALS AND PROCESSES | 1989年 / 412卷
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中图分类号：
O69 [应用化学];
学科分类号：
081704 ;
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页码：210 / 233
页数：24
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