ELECTRON-SPIN RESONANCE STUDY OF METAL NITRIDE SILICON STRUCTURES - OBSERVATION OF SI DANGLING BONDS WITH DIFFERENT CONFIGURATIONS AND TRAPPING PROPERTIES IN SILICON-NITRIDE

被引：8
|
作者：
JOUSSE, D [1 ]
KANICKI, J [1 ]
STATHIS, JH [1 ]
机构：
[1] IBM CORP,THOMAS J WATSON RES CTR,DIV RES,POB 218,YORKTOWN HTS,NY 10598
来源：
APPLIED SURFACE SCIENCE | 1989年 / 39卷 / 1-4期
关键词：
D O I：
10.1016/0169-4332(89)90458-3
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：412 / 419
页数：8
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