ELECTRICAL CHARACTERISTICS OF POLYCRYSTALLINE SILICON-ALUMINUM OXIDE-SILICON DIOXIDE-SILICON STRUCTURE

被引：1
|
作者：
MAEDA, K [1 ]
SHIRAI, K [1 ]
NAKANO, J [1 ]
机构：
[1] FUJITSU LTD,SEMICOND DIV,KAWASAKI,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 1974年 / 13卷 / 07期
关键词：
D O I：
10.1143/JJAP.13.1173
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1173 / 1174
页数：2
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