ELECTRICAL CHARACTERISTICS OF POLYCRYSTALLINE SILICON-ALUMINUM OXIDE-SILICON DIOXIDE-SILICON STRUCTURE

被引：1

作者：

MAEDA, K ^{[1
]}

SHIRAI, K ^{[1
]}

NAKANO, J ^{[1
]}

机构：

[1] FUJITSU LTD,SEMICOND DIV,KAWASAKI,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1974年 / 13卷 / 07期

关键词：

D O I：

10.1143/JJAP.13.1173

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1173 / 1174

页数：2

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