LASER ANNEALING OF POINT-DEFECTS IN SILICON AND GALLIUM-ARSENIDE

被引：0
|
作者：
KACHURIN, GA
NIDAEV, EV
机构：
来源：
SOVIET PHYSICS SEMICONDUCTORS-USSR | 1980年 / 14卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
引用
收藏
页码：251 / 252
页数：2
相关论文
共 50 条
  • [41] ELECTRON-MICROSCOPE STUDIES OF ION-IMPLANTED SILICON AND GALLIUM-ARSENIDE AFTER LASER AND FURNACE ANNEALING
    SADANA, DK
    WILSON, MC
    BOOKER, GR
    JOURNAL OF MICROSCOPY-OXFORD, 1980, 118 (JAN): : 51 - 59
  • [42] NEW EXPERIMENTAL-EVIDENCE OF SURFACE RIPPLES ON GALLIUM-ARSENIDE IN LASER ANNEALING
    TSUKADA, N
    SUGATA, S
    MITA, Y
    APPLIED PHYSICS LETTERS, 1983, 42 (05) : 424 - 426
  • [43] PASSIVATION OF GALLIUM-ARSENIDE WITH SILICON-NITRIDE
    SEKI, H
    YAMAZAKI, H
    FUJIMOTO, M
    KANDA, M
    OHOSAKA, S
    KAWASAKI, Y
    REVIEW OF THE ELECTRICAL COMMUNICATIONS LABORATORIES, 1972, 20 (9-10): : 810 - &
  • [44] GALLIUM-ARSENIDE
    HARRISON, RJ
    OCCUPATIONAL MEDICINE-STATE OF THE ART REVIEWS, 1986, 1 (01): : 49 - 58
  • [45] CARBON, OXYGEN AND SILICON IMPURITIES IN GALLIUM-ARSENIDE
    BROZEL, MR
    CLEGG, JB
    NEWMAN, RC
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1978, 11 (09) : 1331 - 1339
  • [46] SOLID SOLUBILITY OF AMPHOTERIC SILICON IN GALLIUM-ARSENIDE
    TERAMOTO, I
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1974, 13 (11) : 1817 - 1822
  • [47] GALLIUM-ARSENIDE AND OTHER COMPOUND SEMICONDUCTORS ON SILICON
    FANG, SF
    ADOMI, K
    IYER, S
    MORKOC, H
    ZABEL, H
    CHOI, C
    OTSUKA, N
    JOURNAL OF APPLIED PHYSICS, 1990, 68 (07) : R31 - R58
  • [48] POINT-DEFECTS, DIFFUSION MECHANISMS, AND SUPERLATTICE DISORDERING IN GALLIUM ARSENIDE-BASED MATERIALS
    TAN, TY
    GOSELE, U
    YU, S
    CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, 1991, 17 (01) : 47 - 106
  • [49] GALLIUM-ARSENIDE EPITAXY IN SILICON SUBSTRATE WINDOWS
    OSINSKII, VI
    KATSAPOV, FM
    DOKLADY AKADEMII NAUK BELARUSI, 1978, 22 (02): : 123 - 126
  • [50] GALLIUM-ARSENIDE
    THOMPSON, WL
    IRON AGE, 1983, 226 (03): : 8 - 8
12345