COMPARISON OF DIODE AND TRIODE SPUTTER-ION PUMPS

被引：1
|
作者：
DENISON, DR [1 ]
机构：
[1] PERKIN ELMER ULTEK INC,PALO ALTO,CA 95030
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 01期
关键词：
D O I：
10.1116/1.569165
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：633 / 635
页数：3
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