COMPARISON OF DIODE AND TRIODE SPUTTER-ION PUMPS

被引：1

作者：

DENISON, DR ^{[1
]}

机构：

[1] PERKIN ELMER ULTEK INC,PALO ALTO,CA 95030

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 01期

关键词：

D O I：

10.1116/1.569165

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：633 / 635

页数：3

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