COMPARISON OF DIODE AND TRIODE SPUTTER-ION PUMPS

被引：1

作者：

DENISON, DR ^{[1
]}

机构：

[1] PERKIN ELMER ULTEK INC,PALO ALTO,CA 95030

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 01期

关键词：

D O I：

10.1116/1.569165

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：633 / 635

页数：3

共 50 条

[1] STARTING CHARACTERISTICS OF TRIODE AND DIODE SPUTTER-ION PUMPS
KONISHI, A
MIZUMACHI, S
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[2] STARTING MODE DIFFERENCES IN TRIODE AND DIODE SPUTTER-ION PUMPS
SNOUSE, T
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (01): : 283 - &
[3] MEMORY EFFECT FOR ARGON IN TRIODE TYPE SPUTTER-ION PUMPS
HENNING, H
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[4] Sputter-ion pumps
Schulz, L
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[5] PUMPING MECHANISMS OF SPUTTER-ION PUMPS
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01): : 331 - 331
[6] ELECTRICAL CHARACTERISTICS OF SPUTTER-ION PUMPS
WEAR, KB
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[7] BACKSTREAMING FROM SPUTTER-ION PUMPS
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[8] STABILIZATION OF DISCHARGE IN SPUTTER-ION PUMPS
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[9] PHOTOTUBE PROCESSING USING PORTABLE DIODE AND TRIODE SPUTTER-ION PUMP VACUUM SYSTEMS
THEODORO.DG
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[10] COMPARISON OF SPUTTER-ION PUMP AND REDHEAD GAUGE AS APPENDAGE PUMPS
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REVIEW OF SCIENTIFIC INSTRUMENTS, 1969, 40 (01): : 182 - +