METALLURGY OF PLATINUM SILICIDE CONTACTS

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作者：

KOCH, FB

BYRNES, PA

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JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1970年 / 117卷 / 08期

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中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

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页码：C262 / &

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